29.045 : Semiconducting materials

ASTM F80-94

ASTM F80-94

Withdrawn Most Recent

Test Method for Crystallographic Perfection of Epitaxial Deposits of Silicon by Etching Techniques (Withdrawn 1998)

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ASTM F81-01

ASTM F81-01

Withdrawn Most Recent

Standard Test Method for Measuring Radial Resistivity Variation on Silicon Wafers (Withdrawn 2003)

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ASTM F95-89(2000)

ASTM F95-89(2000)

Withdrawn Most Recent

Standard Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer (Withdrawn 2003)

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ASTM F110-00a

ASTM F110-00a

Withdrawn Most Recent

Standard Test Method for Thickness of Epitaxial or Diffused Layers in Silicon by the Angle Lapping and Staining Technique (Withdrawn 2003)

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ASTM F358-83(2002) (R1983)

ASTM F358-83(2002) (R1983)

Withdrawn Most Recent

Standard Test Method for Wavelength of Peak Photoluminescence and the Corresponding Composition of Gallium Arsenide Phosphide Wafers (Withdrawn 2008)

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ASTM F374-00a

ASTM F374-00a

Superseded Historical

Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure

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ASTM F391-96

ASTM F391-96

Superseded Historical

Standard Test Methods for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovoltage

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ASTM F399-00a

ASTM F399-00a

Withdrawn Most Recent

Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002)

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ASTM F416-94

ASTM F416-94

Withdrawn Most Recent

Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)

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ASTM F418-77(2002) (R1977)

ASTM F418-77(2002) (R1977)

Withdrawn Most Recent

Standard Practice for Preparation of Samples of the Constant Composition Region of Epitaxial Gallium Arsenide Phosphide for Hall Effect Measurements (Withdrawn 2008)

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ASTM F522-94

ASTM F522-94

Withdrawn Most Recent

Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)

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ASTM F523-93(1997)

ASTM F523-93(1997)

Superseded Historical

Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces

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ASTM F525-00a

ASTM F525-00a

Withdrawn Most Recent

Standard Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe (Withdrawn 2003)

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ASTM F533-02

ASTM F533-02

Superseded Historical

Standard Test Method for Thickness and Thickness Variation of Silicon Wafers

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ASTM F534-02

ASTM F534-02

Superseded Historical

Standard Test Method for Bow of Silicon Wafers

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