Superseded
Draft standard
Historical
DIN EN 62047-16:2012-11
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods (IEC 47F/125/CD:2012)
Preview
Summary
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 16: Messverfahren zur Ermittlung der Eigenspannungen in Dünnschichten von MEMS-Bauteilen - Substratkrümmungs- und Biegebalken-Verfahren (IEC 47F/125/CD:2012)
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2012 |
| Cancellation Date | 12/01/2015 |
| Page Count | 18 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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