Superseded
Draft standard
Historical
DIN 50451-3:2012-11
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), Arsenic (As), Barium (Ba), Beryllium (Be), Bismuth (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chromium (Cr), Copper (Cu), Iron (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Potassium (K), Lithium (Li), Magnesium (Mg), Manganese (Mn), Molybdenum (Mo), Nickel (Ni), Niobium (Nb), Lead (Pb), Antimony (Sb), Tin (Sn), Strontium (Sr), Tantalum (Ta), Titanium (Ti), Vanadium (V), Zinc (Zn), Zirconium (Zr) in nitric acid by ICP-MS
Preview
Summary
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 3: Aluminium (Al), Arsen (As), Barium (Ba), Beryllium (Be), Bismut (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Kalium (K), Lithium (Li), Magnesium (Mg), Mangan (Mn), Molybdän (Mo), Nickel (Ni), Niob (Nb), Blei (Pb), Antimon (Sb), Zinn (Sn), Strontium (Sr), Tantal (Ta), Titan (Ti), Vanadium (V), Zink (Zn), Zirconium (Zr) in Salpetersäure mittels ICP-MS
Notes
Prévu pour remplacer DIN 50451-3 (2003-04).
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2012 |
| Cancellation Date | 11/01/2014 |
| Page Count | 19 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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