Superseded Standard
Historical

ISO 14644-10:2013

Cleanrooms and associated controlled environments
Part 10: Classification of surface cleanliness by chemical concentration

Summary

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Notes

95.99 : Annulation de la Norme internationale

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 03/01/2013
Edition 1
Page Count 30
EAN ---
ISBN ---
Weight (in grams) ---
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