Superseded
Standard
Historical
ISO 14644-10:2013
Cleanrooms and associated controlled environments
Part 10: Classification of surface cleanliness by chemical concentration
Part 10: Classification of surface cleanliness by chemical concentration
Summary
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
Notes
95.99 : Annulation de la Norme internationale
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 03/01/2013 |
| Edition | 1 |
| Page Count | 30 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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