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IEC 62047-1:2005
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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Summary
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Technical characteristics
| Publisher | International Electrotechnical Commission (IEC) |
| Publication Date | 09/27/2005 |
| Release Date | 09/27/2005 |
| Cancellation Date | 01/06/2016 |
| Edition | 1 |
| Page Count | 49 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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06/01/2016
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27/09/2005
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