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DIN EN 62047-5:2012-03

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches (IEC 62047-5:2011); German version EN 62047-5:2011

Summary

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter (IEC 62047-5:2011); Deutsche Fassung EN 62047-5:2011

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 03/01/2012
Page Count 37
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