DIN EN 62047-3:2007-02
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DIN EN 62047-3:2007-02

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile-testing (IEC 62047-3:2006); German version EN 62047-3:2006

Summary

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung (IEC 62047-3:2006); Deutsche Fassung EN 62047-3:2006

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 02/01/2007
Page Count 9
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ISBN ---
Weight (in grams) ---
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