DIN EN 62047-29:2016-08
Withdrawn Draft standard
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DIN EN 62047-29:2016-08

Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature (IEC 47F/243/CD:2016)

Summary

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 29: Elektromechanisches Relaxations-Prüfverfahren für freistehende elektrisch leitende Dünnschichten bei Raumtemperatur (IEC 47F/243/CD:2016)

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 08/01/2016
Cancellation Date 09/01/2018
Page Count 19
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ISBN ---
Weight (in grams) ---
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