Superseded
Draft standard
Historical
DIN EN 62047-26:2014-05
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (IEC 47F/178/CD:2013)
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Summary
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen (IEC 47F/178/CD:2013)
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 05/01/2014 |
| Cancellation Date | 12/01/2016 |
| Page Count | 53 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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