Superseded Draft standard
Historical

DIN EN 62047-20:2012-07

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 47F/122/CD:2012)

Summary

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 20: Gyroskope (IEC 47F/122/CD:2012)

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 07/01/2012
Cancellation Date 04/01/2015
Page Count 102
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