Superseded Draft standard
Historical

DIN EN 62047-1:2014-05

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)

Summary

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe (IEC 47F/177/CD:2013)

Notes

Prévu pour remplacer DIN EN 62047-1 (2006-10).

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 05/01/2014
Cancellation Date 12/01/2016
Page Count 59
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