DIN 50451-2:2003-04
Withdrawn Standard
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DIN 50451-2:2003-04

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

Summary

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 2: Calcium (Ca), Cobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe), Nickel (Ni) und Zink (Zn) in Flusssäure mittels Plasma-angeregter Emissionsspektrometrie

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 04/01/2003
Page Count 8
EAN ---
ISBN ---
Weight (in grams) ---
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