Withdrawn
Standard
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DIN 50450-3:1991-03
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H<(Index)2>, O<(Index)2>, N<(Index)2>, Ar and He by using a flame ionization detector (FID)
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Summary
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von Methanverunreinigungen in Wasserstoff, Sauerstoff, Stickstoff, Argon und Helium mit einem Flammenionisationsdetektor (FID)
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 03/01/1991 |
| Page Count | 2 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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