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DIN 50441-1:1996-07 (R2021)

Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation

Summary

Prüfung von Materialien für die Halbleitertechnologie - Messung der geometrischen Dimensionen von Halbleiterscheiben - Teil 1: Dicke und Dickenvariation

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 07/01/1996
Confirmation Date 01/11/2021
Cancellation Date 07/01/2007
Page Count 0
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