| Nombre | apoyo | Revisión | Disponibilidad | Fecha de emisión | Precio | ||
|---|---|---|---|---|---|---|---|
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PDF sécurisé |
Inglés |
Vigente |
1/10/2021 |
204,00 € |
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Detalles
This Guide addresses concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).
This Guide is intended to be a tool that can be used to analyze energy, utilities, and materials use by SME.
This Guide also addresses measurements related to energy, utilities, and materials use in SME.
This Guide also addresses continuous improvement planning for energy, utilities, and materials use in SME in order to promote efficiency.
This Guide is a series of options and instructions intended to increase awareness of the reader to available techniques in the area of energy, utilities, and materials use efficiency. A particular course of action is suggested for energy, utilities, and materials use measurement and conversion of use measurements into equivalent energy.
This Guide describes methods for reporting energy, utilities, and material use rate and efficiency improvement in SME.
This Guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy consumption related to SME as well as planning of energy efficiency improvement.
Additionally, this Guide describes setting targets for, verifying, and improving the use or efficiency of utilities, materials, or energy.
This Guide addresses the process, idle, rest, and sleep modes of the use stage of the SME life cycle.
Información adicional
| Autor | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Publicado por | SEMI |
| Tipo de Documento | Norma |
| modificado por | editorially modified in February 2022 |
