| Nombre | apoyo | Revisión | Disponibilidad | Fecha de emisión | Precio | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Inglés |
Vigente |
1/10/2019 |
204,00 € |
|
||
Detalles
The purpose of this Document is to provide specifications for different grades of trichlorosilane that are used in polysilicon industry.
With the growth of the photovoltaic market, the customers demand for quality of polysilicon is extremely high. Trichlorosilane is one of the critical raw materials of polysilicon production.
The impurity content in trichlorosilane may directly impact the quality of polysilicon. The standard for trichlorosilane is to guide the production plants to obtain higher quality materials.
This Document covers the requirements for all grades of trichlorosilane used in the polysilicon production industry.
If analytical methods are incomplete, the requirements are presented as a guideline.
Información adicional
| Autor | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Publicado por | SEMI |
| Tipo de Documento | Norma |
