Nombre | apoyo | Revisión | Disponibilidad | Fecha de emisión | Precio | ||
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PDF sécurisé |
Inglés |
Vigente |
1/2/2018 |
204,00 € |
|
Detalles
These specifications cover substrate requirements for round 100 mm monocrystalline high-purity germanium wafers used in semiconductor and electronic device manufacturing.
A complete purchase specification may require that additional physical, electrical, and bulk properties be defined. These properties are listed, together with test methods suitable for determining their magnitude where such procedures are documented.
These specifications are directed specifically to germanium wafers with one or both sides polished. Unpolished wafers or wafers with epitaxial films are not covered, however, purchasers of such wafers may find these specifications helpful in defining their requirements.
Información adicional
Autor | Semiconductor Equipment and Materials Institute (SEMI) |
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Publicado por | SEMI |
Tipo de Documento | Norma |