SEMI HB4-0913

SEMI HB4-0913

Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)

204,00 €

Detalles

The purpose of this Standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in HB-LED manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI communications Standards for the application in HB-LED manufacturing facilities. On one hand this Standard should reduce the effort of manufacturers to integrate equipment in their IT factory automation system. On the other hand equipment suppliers could reduce their effort for developing and maintaining a variety of equipment communication interfaces. It is expected to provide a proven set of communication functionality to reduce both costs and time for ramp-up of new equipment in the manufacturing production environment.



The document references a collection of SEMI and other standards and should give guidance on how to apply them in the HB-LED manufacturing environment in order to establish a reliable and extensible communication framework for the IT integration of equipment.



This Specification for HB-LED equipment communication interface applies to all HB-LED manufacturing equipment including process, automation and metrology systems used in the Front-End and Back-End production area. However, it is not limited to these areas of application.



The scope of this Standard is limited to the communication interface used to integrate equipment within factory automation systems.



This Standard can be applied to single wafer equipment as well as batch equipment.



This Standard intends to lay the foundation for a reliable and extensible IT integration framework for HB-LED manufacturing based on proven standards using a multilayered approach. The standard references existing SEMI communication Standards to realize these layers as much as possible. The resulting framework is referred to as HB-LED ECI.



This Standard defines a physical/data link layer based on Ethernet.



This Standard utilizes SEMI E37/SEMI E37.1 for message transfer.



This Standard defines a message and data item set based on SEMI E5.



This Standard defines the behavior of HB-LED equipment communication interface based on SEMI E30.

Información adicional

Autor Semiconductor Equipment and Materials Institute (SEMI)
Publicado por SEMI
Tipo de Documento Norma