| Nombre | apoyo | Revisión | Disponibilidad | Fecha de emisión | Precio | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Inglés |
Vigente |
1/6/2019 |
204,00 € |
|
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Detalles
The scope of this Document is to define standards that facilitate the host’s knowledge and role in automated and manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this Document provides state models and scenarios that define the host interaction with the equipment for the following:
Carrier transfer between AMHS vehicles and production equipment load ports.
Carrier transfers to/from production equipment internal buffer space.
Equipment and load port access mode switching.
Carrier to load port association.
CarrierID verification and Carrier slot map verification.
Información adicional
| Autor | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Publicado por | SEMI |
| Tipo de Documento | Norma |
