SEMI E172-0320

SEMI E172-0320

Specification for SECS Equipment Data Dictionary (SEDD)

204,00 €

Detalles

The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment. This is a type of documentation, called the SECS Equipment Data Dictionary (SEDD). It is primarily intended as a means for an equipment supplier to provide such documentation to its customers. The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment.



This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation. This is a supplement to that documentation.



The SEDD is intended to be a data set that documents key elements of a SECS-II interface. The form in which this data is provided is intended to be comprehensible to both humans and software applications.

Información adicional

Autor Semiconductor Equipment and Materials Institute (SEMI)
Publicado por SEMI
Tipo de Documento Norma