SEMI E142-0921

SEMI E142-0921

Specification for Substrate Mapping

360,00 €

Detalles

This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.





This version of the Specification applies to the substrate types: wafers, frames, strips, and trays.







This Specification addresses assembly and packaging including the testing of semiconductor devices.

Información adicional

Autor Semiconductor Equipment and Materials Institute (SEMI)
Publicado por SEMI
Tipo de Documento Norma
Número de páginas 53
Reemplaza SEMI E142-0820