| Nombre | apoyo | Revisión | Disponibilidad | Fecha de emisión | Precio | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Inglés |
Vigente |
1/8/2019 |
204,00 € |
|
||
Detalles
The purpose of this Document is to provide specification for hexafluoroethane (C2F6) that is used in the semiconductor industry.
This Document covers requirements for hexafluoroethane used in the semiconductor industry.
Información adicional
| Autor | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Publicado por | SEMI |
| Tipo de Documento | Norma |
