ISO 17973:2024

ISO 17973:2024

Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

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Detalles

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Información adicional

Autor International Organization for Standardization (ISO)
Comité ISO/TC 201/SC 7
Publicado por ISO
Tipo de Documento Norma
Edición 3
ICS 71.040.40 : Análisis químico
Número de páginas 11
Reemplaza ISO 17973:2016
Palabra clave ISO 17973:2024