IEST G-CC035.1:2009

IEST G-CC035.1:2009

Design Considerations for AMC Filtration Systems in Cleanrooms

309,00 €

Detalles

This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.

Información adicional

Autor Institute of Environmental Sciences and Technology
Publicado por IEST
Tipo de Documento Norma
Tema /subgroups/50840
EAN ISBN 9780978786885
Número de páginas 24
Palabra clave IEST G-CC035.1