IEST RP-CC042.1:2011

IEST RP-CC042.1:2011

Sizing and Counting of Submicrometer Liquid-borne Particles Using Optical Discrete-particle Counters

439,00 €

Details

This Recommended Practice (RP) addresses the sizing and counting of submicrometer liquid-borne particles using optical discrete-partical counters with a focus on applications in the semiconductor, flat-panel display, and data storage industries. Liquid-borne particle measurement involves many technical challenges that can substantially affect results in both sizing and counting of particles. This RP is intended as a single source covering those challenges and solutions and provides a handy reference for professionals in this field.

Zusätzliche Information

Autor Institute of Environmental Sciences and Technology
Veröffentlicht von IEST
Document type Normen
Thema /subgroups/50840
EAN ISBN 9780915414475, 9780915414093
Seitenzahl 32
Schlagwort IEST RP-CC042.1