Handbook for cleaning for semiconductor manufacturing

Handbook for cleaning for semiconductor manufacturing

Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications

213,33 €

Details

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing.

Zusätzliche Information

Autor Karen A. Reinhardt , Richard F. Reidy
Veröffentlicht von WILEY
Document type Buch
EAN ISBN 978-0-470-62595-8
Seitenzahl 590
Gewicht(kg.) 1.1030