SME MS00-236:2000

SME MS00-236:2000

New Developments In Deep Ultraviolet Laser Metrology For Photolighography

19,00 €

Détails

Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.

Informations supplémentaires

Auteur Society of Manufacturing Engineers
Edité par SME
Type de document Norme
Thème /subgroups/9450
Nombre de pages 3
Mot-clé SME MS00-236