Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
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PDF |
Anglais |
Active |
01/11/2000 |
19,00 € |
|
Détails
Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.
Informations supplémentaires
Auteur | Society of Manufacturing Engineers |
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Edité par | SME |
Type de document | Norme |
Thème | /subgroups/9450 |
Nombre de pages | 3 |
Mot-clé | SME MS00-236 |