SEMI S25-0319

SEMI S25-0319

Safety Guideline for Hydrogen Peroxide Storage & Handling Systems

204,00 €

Détails

The purpose of this Safety Guideline is to set out the minimum safety and health criteria to be applied to equipment and systems for storage and handling of hydrogen peroxide in the semiconductor and flat panel display industries.



This Safety Guideline addresses concentrations of hydrogen peroxide (H2O2) commonly used in the semiconductor and FPD industries (i.e., concentrations below 40% w/w).



This Safety Guideline is focused on the storage, handling, transfer, and distribution of hydrogen peroxide within the semiconductor or flat panel display facility.



This Safety Guideline includes the following sections:



Purpose (§ 1)



Scope (§ 2)



Limitations (§ 3)



Referenced Standards and Documents (§ 4)



Terminology (§ 5)



Safety Philosophy (§ 6)



General Principles (§ 7)



Education and Training (§ 8)



Emergency Response (§ 9)



Materials, Components and Construction (§ 10)



Storage (§ 11)



Operations (§ 12)



Distribution Systems and Modules/Auxiliary Equipment (§ 13)

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme