| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Anglais |
Active |
01/02/2020 |
204,00 € |
|
||
Détails
Although the substrates used in the production of MEMS share many physical and electrical properties with those used in IC manufacturing there are some significant differences as well. There exists a need to standardize MEMS substrates to allow the stocking of standard material, lowering the time to purchase, time to market and overall cost. This specification provides the necessary information for ordering and specifying such substrates.
This Document can be used as a basic purchasing template between the substrate buyer and seller of 150 and 200 mm nominal diameter substrates.
This Document contains the information needed to specify selected categories of substrates used in MEMS manufacturing including information on physical properties such as dimensions and surface properties as well as basic electrical properties.
The values for characteristics, which have been historically agreed upon between supplier and user are listed in tabular form in this Specification. Where values have not been historically agreed upon, the property has been listed with a value to be specified between the buyer and seller.
One or more methods for measurements used to determine the tabulated characteristics are included where practical.
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
