| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
|---|---|---|---|---|---|---|---|
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PDF sécurisé |
Anglais |
Active |
01/03/2020 |
204,00 € |
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Détails
The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers, equipment suppliers, and end-users.
This Test Method applies to surface mount and conventional gas delivery systems used in semiconductor manufacturing equipment.
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
