| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Anglais |
Active |
01/04/2022 |
204,00 € |
|
||
Détails
This Specification provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries.
This Specification defines metrics and calculations for measurement of equipment productivity, including overall equipment efficiency (OEE).
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
