SEMI E6-0914

SEMI E6-0914

Guide for Semiconductor Equipment Installation Documentation

204,00 €

Détails

Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and semiconductor manufacturers by communicating, in a standardized way, the information necessary to prepare the facility and to efficiently install semiconductor equipment.



This Standard applies to the facilities interface of all semiconductor production equipment and supplier-provided support equipment.



The recommended equipment installation documentation should cover all installation requirements from receiving until hookup is complete.



The series of data sheets included should address all site facilities necessary to support semiconductor equipment processing.



The data sheets provide a consistent format for both the equipment supplier and equipment purchaser to use in compiling and interpreting equipment installation data.

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme