| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
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PDF sécurisé |
Anglais |
Active |
01/10/2019 |
204,00 € |
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Détails
This Document defines a communication specification based on the MOTIONNET® protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
This Document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator devices.
This Document specifies how Sensor/Actuator/Controller devices interoperate on the network specific for the MOTIONNET Public specification referenced in the § 4, as a part of equipment’s control system.
This Document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This Document is to be used with the CDM and one or more SDMs, as well as the MOTIONNET Public Specification.
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
