SEMI E178-0120

SEMI E178-0120

Guide for EDA Freeze Version

204,00 €

Détails

This Standard provides the guide for combining versions of the SEMI EDA Standards for the successful EDA implementation.



This Standard applies to the semiconductor manufacturing equipment applying specifications defined in the EDA Standards which apply Web Service for the message exchange.

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme