| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
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PDF sécurisé |
Anglais |
Active |
01/08/2019 |
204,00 € |
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Détails
The purpose of this Standard is to provide a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host.
The purpose of this Standard is to introduce Wafer Job (WJ) in order to observe and/or control a wafer (and its information including context information from related actions such as pre-processing, processing, and post-processing steps) in the equipment independently.
The purpose of this Standard is to provide Wafer Job Object (WJOBJ) model so that the information that should be managed in conjunction with the WJ can be encapsulated in the object and can be accessed from the host.
The purpose of this Standard is to introduce Wafer Flow Job (WFJ) in order to manage multiple WJs in the equipment.
The purpose of this Standard is to provide Wafer Flow Job Object (WFJOBJ) model so that the information that should be managed in conjunction with the WFJ can be encapsulated in the object and can be accessed from the host.
The scope of this Standard is to define WJOBJ which represents WJ.
The scope of this Standard is to define WFJOBJ which represents WFJ.
The scope of this Standard is to define related functionalities which support WJ and/or WFJ.
This Standard mainly focuses on product wafer, however does not exclude non-product wafers.
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
