SEMI C85-0214 (Reapproved 11/19) (R2019)

SEMI C85-0214 (Reapproved 11/19) (R2019)

Guide for Methyl Isobutyl Carbinol (MIBC)

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Détails

The purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified.



The scope of this Document covers MIBC which is used in the semiconductor industry.

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme
Date de confirmation 2019-11-01