SEMI C84-0214 (Reapproved 11/19) (R2019)

SEMI C84-0214 (Reapproved 11/19) (R2019)

Guide for Cyclopentanone

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Détails

The purpose of this Document is to provide a guide for cyclopentanone for which a need has been identified.



The scope of this Document covers cyclopentanone which is used in the semiconductor industry.

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme
Date de confirmation 2019-11-01