Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
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PDF sécurisé |
Anglais |
Active |
01/02/2014 |
204,00 € |
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Détails
The purpose of this Document is to provide a guide for cyclopentanone for which a need has been identified.
The scope of this Document covers cyclopentanone which is used in the semiconductor industry.
Informations supplémentaires
Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
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Edité par | SEMI |
Type de document | Norme |
Date de confirmation | 2019-11-01 |