SEMI C82-0713 (Reapproved 08/19) (R2019)

SEMI C82-0713 (Reapproved 08/19) (R2019)

Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter

204,00 €

Détails

This Document is to provide a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter.



This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter.



This Document defines a test condition for monodispersed GNP challenge test.



 

The following areas are to be addressed in this Document:



The test condition such as fluid, flow rate, pressure, GNP concentration, ligand concentration, membrane treatment etc.



The type of filter evaluated.



The type of gold nanoparticle (GNP) (reference material).



The method of membrane treatment prior to the test for decreasing the adsorbing effect.



The description of the test result.

Informations supplémentaires

Auteur Semiconductor Equipment and Materials Institute (SEMI)
Edité par SEMI
Type de document Norme
Date de confirmation 2019-08-01