| Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
|---|---|---|---|---|---|---|---|
|
PDF sécurisé |
Anglais |
Active |
01/05/2014 |
204,00 € |
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Détails
The purpose of this Document is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
The scope of this Document is all grades of acetone used in the semiconductor industry.
Informations supplémentaires
| Auteur | Semiconductor Equipment and Materials Institute (SEMI) |
|---|---|
| Edité par | SEMI |
| Type de document | Norme |
| Date de confirmation | 2019-11-01 |
