IEC TS 62607-6-5:2022

IEC TS 62607-6-5:2022

IEC TS 62607-6-5:2022 Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement

173,00 €

Détails

IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics

* contact resistance, and
* sheet resistance

for graphene-based materials and other two-dimensional materials by a

* transmission line measurement.

The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.

* The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
* The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.

Informations supplémentaires

Auteur International Electrotechnical Commission (IEC)
Comité TC 113
Edité par IEC
Type de document Norme
Edition révision n° 1
ICS 07.120 : Nanotechnologie
Nombre de pages 23
Mot-clé IEC62607-6-5,IEC TS 62607-6-5:2022,IEC/TS 62607-6-5,TC 113