IEC TR 63258:2021

IEC TR 63258:2021

IEC TR 63258:2021 Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

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Détails

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Informations supplémentaires

Auteur International Electrotechnical Commission (IEC)
Comité TC 113
Edité par IEC
Type de document Norme
Edition révision n° 1
ICS 07.120 : Nanotechnologie
Nombre de pages 21
Mot-clé IEC63258,IEC TR 63258:2021,IEC/TR 63258,TC 113