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DIN 50450-9:2021-07

DIN 50450-9:2021-07

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

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DIN 50450-9:2021-07
PDF
Allemand
Active
01/07/2021
39,35 €

DIN 50450-9:2021-07 + Redline
PDF
Allemand
Active
01/07/2021
47,29 €

Informations supplémentaires

Auteur Deutsche Institut für Normung e.V. (DIN)
Edité par DIN
Type de document Norme
ICS 29.045 : Matériaux semi-conducteurs
71.100.20 : Gaz pour les applications industrielles
Nombre de pages 8
Mot-clé DIN 50450-9
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