Nom | Support | Langue | Disponibilité | Date d'édition | Prix | ||
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PDF sécurisé |
Anglais |
Active |
01/08/2018 |
83,00 € |
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Détails
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less "nanoscale" are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
Informations supplémentaires
Auteur | ANSI/IEST/ISO |
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Edité par | IEST |
Type de document | Norme |
Thème | /subgroups/50840 |
Edition révision n° | 1 |
Nombre de pages | 18 |
Remplace | ISO/FDIS 14644-12,ISO/DIS 14644-12 |
Mot-clé | ANSI/IEST/ISO 14644-12 |
ANSI Approved |