ANSI/IEST/ISO 14644-12

ANSI/IEST/ISO 14644-12

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

83,00 €

Détails

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less "nanoscale" are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.

Informations supplémentaires

Auteur ANSI/IEST/ISO
Edité par IEST
Type de document Norme
Thème /subgroups/50840
Edition révision n° 1
Nombre de pages 18
Remplace ISO/FDIS 14644-12,ISO/DIS 14644-12
Mot-clé ANSI/IEST/ISO 14644-12
ANSI Approved