UNE-EN 62047-25:2016

UNE-EN 62047-25:2016

Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Española de Normalización in January of 2017.)

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Additional Info

Author Asociacion Espanola de Normalizacion y Certificacion (AENOR)
Committee CTN 209/SC 47 - SEMICONDUCTOR DEVICES
Published by AENOR
Document type Standard
ICS 31.080.99 : Other semiconductor devices
Number of pages 31
Keyword UNE-EN 62047-25:2016