UNE-EN 62047-21:2014

UNE-EN 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

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Additional Info

Author Asociacion Espanola de Normalizacion y Certificacion (AENOR)
Committee CTN 209/SC 47 - SEMICONDUCTOR DEVICES
Published by AENOR
Document type Standard
ICS 31.080.99 : Other semiconductor devices
Number of pages 17
Keyword UNE-EN 62047-21:2014