JIS C 5630-26:2017

JIS C 5630-26:2017

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

€36.27

Additional Info

Author Japanese Industrial Standard (JIS) / Japanese Standards Association (JSA)
Published by JSA
Document type Standard
ICS 31.080.01 : Semiconductor devices in general
31.220.01 : Electromechanical components in general
Number of pages 24
Document history
Keyword JIS C 5630,JIS 5630,5630