| Name | Support | Language | Availability | Edition date | Price | ||
|---|---|---|---|---|---|---|---|
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PDF sécurisé |
English |
Active |
12/1/2002 |
€262.00 |
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Details
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. IEST RP-CC024.1 is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
Additional Info
| Author | Institute of Environmental Sciences and Technology |
|---|---|
| Published by | IEST |
| Document type | Standard |
| Theme | /subgroups/50840 |
| EAN ISBN | 9781877862243 |
| Number of pages | 20 |
| Keyword | IEST RP-CC024.1 |
