Name | Support | Language | Availability | Edition date | Price | ||
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PDF |
English, French |
Active |
7/13/2020 |
€219.00 |
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Details
IEC 63068-3:2020 provides definitions and guidance in use of photoluminescence for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies photoluminescence images and emission spectra to enable the detection and categorization of the defects in SiC homoepitaxial wafers.
Additional Info
Author | International Electrotechnical Commission (IEC) |
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Committee | TC 47 |
Published by | IEC |
Document type | Standard |
Edition | 1.0 |
ICS | 31.080.99 : Other semiconductor devices
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Number of pages | 51 |
Keyword | IEC63068-3,IEC 63068-3:2020,IEC 63068-3,TC 47 |