| Name | Support | Language | Availability | Edition date | Price | ||
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PDF |
English, French |
Active |
3/5/2015 |
€219.00 |
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Details
IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 µ to 10 µ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.
Additional Info
| Author | International Electrotechnical Commission (IEC) |
|---|---|
| Committee | TC 47/SC 47F |
| Published by | IEC |
| Document type | Standard |
| Edition | 1.0 |
| ICS | 31.080.99 : Other semiconductor devices
|
| Number of pages | 54 |
| Keyword | IEC62047-17,IEC 62047-17:2015,IEC 62047-17,TC 47/SC 47F |
