IEC 62047-1:2016

IEC 62047-1:2016

IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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Details

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms,
b) revision of twelve terms,
c) addition of sixteen new terms.

Additional Info

Author International Electrotechnical Commission (IEC)
Committee TC 47/SC 47F
Published by IEC
Document type Standard
Edition 2.0
ICS 31.080.99 : Other semiconductor devices
Number of pages 66
Keyword IEC62047-1,IEC 62047-1:2016,IEC 62047-1,TC 47/SC 47F